Lattice-Boltzmann Simulations of Fluid Flows in MEMS

摘要

The lattice Boltzmann model is a simplified kinetic method based on theparticle distribution function. We use this method to simulate problems inMEMS, in which the velocity slip near the wall plays an important role. It isdemonstrated that the lattice Boltzmann method can capture the fundamentalbehavior in micro-channel flow, including velocity slip and nonlinear pressuredrop along the channel. The Knudsen number dependence of the position of thevortex center and the pressure contour in micro-cavity flows is alsodemonstrated.